Features
- Significantly improved Rate stability
- Fewer frequency jumps
- Ability (CI value) measurable
- Logs can be stored on the CRTM console
- 8 simultaneously measured sensors
- 56 Max digital inputs
- 16 Max digital outputs
Applications
- Film thickness and deposition rate control during evaporation.
Need more information?
At ULVAC, we understand that finding the right product is crucial for optimizing your processes, whether you're scaling up production or maintaining precision in your systems. With our wide range of cutting-edge vacuum technologies and in-depth expertise, we will guide you through selecting the ideal solution tailored to your unique requirements.
Contact ULVAC Component Sales & Support For inquiries outside North and South America, please contact ULVAC CorporateSpecifications
| Frequency | Measurement range | 4.00 to 3.00MHz @4MHz 5.00 to 3.50MHz @5MHz 6.00 to 4.50MHz @6MHz |
| Measurement resolution | 1mHz | |
| Display resolution | 1mHz | |
| Deposition rate | Measurement range *1 | 0.000 to 999.9Å/s (0 to 99.99nm/s) |
| Measurement resolution *2 | 0.0028Å/s @4MHz 0.0018Å/s @5MHz 0.0012Å/s @6MHz |
|
| Display resolution *1 | 0.001Å/s | |
| Film thickness | Measurement range *1 | 0.000 to 9999kÅ (0 to 999.9μm) |
| Measurement resolution *2 | 0.0028Å @4MHz 0.0018Å @5MHz 0.0012Å @6MHz |
|
| Display resolution *1 | 0.001kÅ | |
| Sensor frequency | 4MHz, 5MHz, 6MHz | |
| Number of sensors that can be installed (single) | 2 (Optionally a set of 2 sensors can be added, up to 8 sensors.) | |
| Number of sensors that can be installed (multi) | 2 (Optionally a set of 2 sensors can be added, up to 8 sensors.) | |
| Sampling rate | 100msec | |
| Number of deposition programs | 999 | |
| Number of Process programs | 99 | |
| Digital input point | 14 (Optionally a set of 14 points can be added, up to 56 points.) | |
| Digital output point | 8 (Optionally a set of 8 points can be added, up to 32 points.) | |
| Analog output point | 2 (Optionally a set of 2 points can be added, up to 16 points.) | |
| Analog output range | -10 to +10V | |
| Communication method | Ether (1000BASE-T/100BASE-TX/10BASE-T) RS-232C USB (Type-B, for setting with dedicated software) |
|
| External dimensions (W x D x H) | CRTM-R1: Approx. 480 x 320 x 130mm CTM(-D): Approx. 80 x 152 x 53 mm |
|
| Weight (kg) | CRTM-R1: 5.3kg (up to 5.8kg with options installed) CTM(-D): 0.6 kg |
|
| Utility | AC 100 to 240V±10%, 50/60Hz | |
| Maximum Power Consumption | 150W | |
| Suitable Fuse | 250V 2.5A (2pcs of 5 x 20mm) | |
| IP Protection Class | IP20 | |
| Overvoltage Category | CAT.? | |
| Altitude | 2000m or less above sea level | |
| Contamination level | 2 | |
| Operating environment | Temperature 5 to 40? Humidity 20 to 85%RH (no condensation) |
|
| Storage environment | Temperature -10 to 60? Humidity 20 to 85%RH (non-energizing, no condensation) |
|
| Warm-up time | Approx. 30 minutes | |
| Applicable standard | CE | |
* 1: This is the value when Tooling = 100 and Density = 1
* 2: This is the value that is converted frequency resolution with Tooling = 100 and Density = 1.
Option introduction
When using CRTM-R1, Requires options such as CTM(-D) and cables, CRTS sensors and feedthroughs.
