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CME Series
CME-200E/400 is the most suitable model in the PE-CVD series production system for deposition of Si films with application as Insulator or barrier layers.
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DC Power Supply
ULVAC’s Digital DC Series is engineered to support the most demanding film deposition environments. From semiconductor fabrication to advanced optical coatings. -
Qulee RGM2
Designed to meet the demands of diverse process monitoring applications, including etching, CVD, and other reactive gas processes. -
SPW Series
The SPW roll coater series is perfect for depositing multilayer films on rolls up to 1.65 meters in width.
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