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DC Power Supply
ULVAC’s Digital DC Series is engineered to support the most demanding film deposition environments. From semiconductor fabrication to advanced optical coatings. -
RISE Series
Batch-Type chemical cleaning system used for the removal of native oxide in narrow and deep-contact patterns found in advanced semiconductor devices.
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ENVIRO-Optima
The ENVIRO-Optima resist strip system provides the highest throughput per m2 of clean-room space at the lowest cost.
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Qulee RGM2
Designed to meet the demands of diverse process monitoring applications, including etching, CVD, and other reactive gas processes. -
ENTRON-EX
The Entron-EX multi-chamber sputtering system is specifically designed for the 300mm Semiconductor market.
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ENTRON-EX2
Multi-chamber Sputtering System ENTRONTM-EX2 W300 is latest 300mm PVD platform capable of running the most advanced Semiconductor processes.
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