The Entron-EX multi-chamber sputtering system is specifically designed for the 300mm Semiconductor market. This system is equipped with the latest process chambers for advanced 300mm processing.
For life sciences applications requiring clean, reliable vacuum performance, ULVAC’s small dry pumps deliver exceptional precision with oil-free operation, ensuring contamination-free environments for sensitive instruments. Whether supporting mass spectrometry, liquid handling, or diagnostic devices, ULVAC small dry pumps provide the consistent vacuum power needed to enhance efficiency, protect samples, and drive scientific innovation.