Features
- Switch between two deposition sensors
- Low deposition rate process control with high film-thickness resolution
- Sampling rate of 125ms provides excellent output response
- Up to 99 deposition programs can be stored with battery backup.
- Controller memory can record up to 30 process sequences
- RS232C interface is included as standard
- 12ch digital programmable input/output
- The 3ch programmable analog output signals (Power, Rate, Thickness)
- Up to 3 steps can be input for pre-heating and rate control for very precise control.
Applications
- Film thickness and deposition rate control during evaporation.
Need more information?
At ULVAC, we understand that finding the right product is crucial for optimizing your processes, whether you're scaling up production or maintaining precision in your systems. With our wide range of cutting-edge vacuum technologies and in-depth expertise, we will guide you through selecting the ideal solution tailored to your unique requirements.
Contact ULVAC Component Sales & Support For inquiries outside North and South America, please contact ULVAC Corporate