ULVAC's Pirani is a thermal conductivity measuring gauge. The Platinum filament is heated when electrical current flows through it. The electrical resistance varies based on the changes in pressure.
Pressure Range:
4.0X10-1 to 3.0X10-3Pa
3X10-3 to 22 Torr
4X10-3 to 3 mbar
Accuracy:
±15% (51 to 760Pa, 3.8X10-1 to 5.7 Torr, 5.7 Torr, 5.1X10-1 to 7.6 mbar)
±30% (10 to 1000Pa, 7.5X10-2 to 7.5 Torr, 0.1 to 10m bar)
±50% (0.4 to 3000 Pa, 3X10-3 to 22 Torr, 4X10-3 to 3 bar)
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Contact ULVAC Component Sales & Support For inquiries outside North and South America, please contact ULVAC CorporateOPERATING PROCEDURE
- Start measurement more than one minute after power is turned ON and the indication is stabilized.
- For precision measurement, wait for at least 10 minutes until temperature equilibrium of the sensor head is established.
- Do not turn OFF the power when a sequence of measurements is being made.
- Characteristics may change If the sensor head is exposed to a chemically active gas or highly adsorptive gas.
- In such a case, fill the chamber with nitrogen, inert gas or dry air with the sensor head energized with power, and then evacuate it. Repeat this purging operation.
- If there is no prospect of the characteristics being restored by purging operation, replace the sensor head.
- The Pirani vacuum gauge is sensitive to all types of gas.
