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SIV Series

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Inline Panel Sputtering

The SIV inline system is meant for PVD onto substrates up to 1,000mm x 1,000mm. An excellent tool for depositing LCO, LPO, and ITO onto panels. System is capable of 500mm max substrate size. Stocker chamber can be added to enable automatic running of system.

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Key Features

  • Substrate size: 1,000mm x 1,000mm
  • RTA module integrated
  • Special designed chamber for LCO, LPO deposition
  • Special cathode equipped for particle reduction
  • High quality/density LCO/LPO target deliverable with tool
  • Pass-by or continous deposition
  • ITO Deposition

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At ULVAC, we understand that finding the right product is crucial for optimizing your processes, whether you're scaling up production or maintaining precision in your systems. With our wide range of cutting-edge vacuum technologies and in-depth expertise, we will guide you through selecting the ideal solution tailored to your unique requirements.

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For inquiries outside North and South America, please contact ULVAC Corporate
 

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