Key Features
- Supports various evaporation sources (i.e. EB, RH, EB + RH etc.).
- Substrate holders complying with each process (i.e. lift-off, planetary, satellite etc.).
- Supports various substrates; substrates size from φ2in to 6in, rectangular substrates, Si, compounds, glass and ceramics.
- Display and operation on LCD touch panel.
- Superior PC-operating system and functions (recipe function, data logging, maintenance assist function).
Need more information?
At ULVAC, we understand that finding the right product is crucial for optimizing your processes, whether you're scaling up production or maintaining precision in your systems. With our wide range of cutting-edge vacuum technologies and in-depth expertise, we will guide you through selecting the ideal solution tailored to your unique requirements.
Contact ULVAC System Sales & Support For inquiries outside North and South America, please contact ULVAC Corporate