Key Features
- The substrate transfer system uses the latest winding control technology, ensuring stable transfer for every substrate material and size.
- Induction heating, resistance heating, and EB heating evaporation sources are available. The optimum source for the application can be selected.
- A wide range of pre- and post-process mechanisms are available to enable optimum process conditions.
- Film thickness monitors for online measurement are available (transmission film thickness monitor, eddy current film thickness monitor, resistance value monitor, others).
Need more information?
At ULVAC, we understand that finding the right product is crucial for optimizing your processes, whether you're scaling up production or maintaining precision in your systems. With our wide range of cutting-edge vacuum technologies and in-depth expertise, we will guide you through selecting the ideal solution tailored to your unique requirements.
Contact ULVAC System Sales & Support For inquiries outside North and South America, please contact ULVAC Corporate
